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Aluminum High Vacuum Angle Valve XLA/C/F/G
High Vacuum Equipment ? High Vacuum Valves
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?Aluminum bodied
Uniform baking temperature
Lightweight, Compact
Minimal outgassing
Minimal contamination from heavy metals
?Bellows are replaceable.
Safety Instructions System Configuration/Role of Each Line and Component Series Variations Glossary Auto Switches Common Specifications Green Procurement (RoHS)
| Series | Actuation | Valve type | Shaft seal type | Application | Flange size |
|---|---|---|---|---|---|
| XLA-2 | Air operated | Single acting (N.C.) | Bellows seal | Dust free, Cleaned | 16 to 80 |
| XLAV-2 (With solenoid valve) | Air operated | Single acting (N.C.) | Bellows seal | Dust free, Cleaned | 16 to 80 |
| XLC-2 | Air operated | Double acting | Bellows seal | Dust free, Cleaned | 16 to 80 |
| XLF-2 | Air operated | Single acting (N.C.) | O-ring seal | High-speed operation, High operating cycles | 16 to 80 |
| XLFV-2 (With solenoid valve) | Air operated | Single acting (N.C.) | O-ring seal | High-speed operation, High operating cycles | 16 to 80 |
| XLG -2 | Air operated | Double acting | O-ring seal | High-speed operation, High operating cycles | 16 to 80 |
Aluminum High Vacuum Angle Valve XL□
High Vacuum Equipment ? High Vacuum Valves
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?High fluorine resistance
?Minimal outgassing
?Minimal contamination from heavy metals
∗ The XLA(V)/C/F(V)/G with flange sizes of 16 to 80 has been
discontinued in September 2017.
Please select the XLA(V)-2/XLC-2/XLF(V)-2/XLG-2 series.
Safety Instructions System Configuration/Role of Each Line and Component Series Variations Glossary Auto Switches Common Specifications Green Procurement (RoHS)
| Series | Actuation | Valve type | Shaft seal type | Application | Flange size |
|---|---|---|---|---|---|
| XLA | Air operated | Single acting (N.C.) | Bellows seal | Dust-free Cleaned | 100?160 |
| XLAV (With solenoid valve) | Air operated | Single acting (N.C.) | Bellows seal | Dust-free Cleaned | 100?160 |
| XLC | Air operated | Double acting | Bellows seal | Dust-free Cleaned | 100?160 |
| XLCV (With solenoid valve) | Air operated | Double acting | Bellows seal | Dust-free Cleaned | 100?160 |
| XLF | Air operated | Single acting (N.C.) | O-ring seal | High-speed operation High operating cycles | （80）?100?160 |
| XLFV (With solenoid valve) | Air operated | Single acting (N.C.) | O-ring seal | High-speed operation High operating cycles | （80）?100?160 |
| XLG | Air operated | Double acting | O-ring seal | High-speed operation High operating cycles | 100?160 |
| XLGV (With solenoid valve) | Air operated | Double acting | O-ring seal | High-speed operation High operating cycles | 100?160 |
| XLD | Air operated | Single acting (N.C.) | Bellows/O-ring seal | For preventing dust turbulence For preventing a pump from running overloaded | 25 to 160 |
| XLDV (With solenoid valve) | Air operated | Single acting (N.C.) | Bellows/O-ring seal | For preventing dust turbulence For preventing a pump from running overloaded | 25 to 160 |
| XLH | Manual | Manual | Bellows seal | Dust-free Cleaned | 16 to 50 |
| XLS | Electromagnetic | Single acting (N.C.) | (Bellows balance) | For portable equipment not requiring air | 16, 25 |
Aluminum One-touch Connection and Release High Vacuum Angle Valve XLAQ/XLDQ
High Vacuum Equipment ? High Vacuum Valves
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?One-touch connection and release (No tools are required.)
Safety Instructions System Configuration/Role of Each Line and Component Series Variations Glossary Auto Switches Common Specifications Green Procurement (RoHS)
| Series | Actuation | Shaft seal type | Valve type | Material | Flange size |
|---|---|---|---|---|---|
| XLAQ | Air operated | Bellows seal | Single acting (N.C.) | Body : Aluminum Bellows : Stainless steel 316L | 16 to 50 |
| XLDQ | Air operated | Bellows seal O-ring seal | Single acting (N.C.) | Body : Aluminum Bellows : Stainless steel 316L | 40, 50 |
Stainless Steel High Vacuum Angle/In-line Valve XM/XY
High Vacuum Equipment ? High Vacuum Valves
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?The precision casting, unified composition prevents the accumulation of gas.
?The XM series is interchangeable with the XL series aluminum high vacuum angle valve.
Note) Size 16 is not available for the in-line type.
Safety Instructions System Configuration/Role of Each Line and Component Series Variations Glossary Auto Switches Common Specifications Green Procurement (RoHS)
| Series | Actuation | Shaft seal type | Valve type | Material | Flange size |
|---|---|---|---|---|---|
| XMA/XYA | Air operated | Bellows seal | Single acting (N.C.) | Body : SCS13 (Equivalent to stainless steel 304) Bellows : Stainless steel 316L | 16 to 80 Note) |
| XMC/XYC | Air operated | Bellows seal | Double acting | Body : SCS13 (Eequivalent to stainless steel 304) Bellows : Stainless steel 316L | 16 to 80 Note) |
| XMD/XYD | Air operated | Bellows/O-ring seal | Single acting (N.C.) | Body : SCS13 (Equivalent to stainless steel 304) Bellows : Stainless steel 316L | 25 to 80 |
| XMH/XYH | Manual | Bellows seal | Manual | Body : SCS13 (Equivalent to stainless steel 304) Bellows : Stainless steel 316L | 16 to 50 Note) |
Normal Close High Vacuum Solenoid Valve XSA
Process Valves ? Compact 2/3 Port Solenoid ValvesHigh Vacuum Equipment ? High Vacuum Valves
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?Minimum operating pressure: 1 × 10-6 Pa (abs)
?Leakage: Internal 1.3 × 10-9 Pa·m3/s, External 1.3 × 10-11 Pa·m3/s
?2 types of fittings and female threads are available.
?Power consumption: Max. 25% reduction
?Weight: Max. 18% lighter (0.5 kg → 0.41 kg)
Safety Instructions System Configuration/Role of Each Line and Component Series Variations Glossary Auto Switches Common Specifications Green Procurement (RoHS)
| Series | Valve type | Fluid | Piping | Port size |
|---|---|---|---|---|
| XSA | Normally closed | Air Inert gas | Face seal fitting Compression fitting | 1/4, 3/8 |
| XSA | Normally closed | Air Inert gas | Rc, NPT female thread | 1/8, 1/4, 3/8 |
Smooth Vent Valve XVD
High Vacuum Equipment ? High Vacuum Valves
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?The valve/needle valve-integrated construction requires only 1/4 the piping space of previous models.
?Particle numbers have been significantly reduced through the use of a metal diaphragm in the sheet portion.
?Flow of both the initial air supply and the main air supply can be adjusted.
Safety Instructions System Configuration/Role of Each Line and Component Series Variations Glossary Auto Switches Common Specifications Green Procurement (RoHS)
| Series | Valve type | Fluid | Piping | Port size |
|---|---|---|---|---|
| XVD | Normally closed (Pressurize to open, Spring seal) | Nitrogen, Air, Inert gas, etc. | VCR? Swagelok? | 1/4B |
Slit Valve XGT
High Vacuum Equipment ? Slit Valves
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?This product is suitable to act as the partition valve between the load lock chamber and the transfer chamber or between the transfer chamber and the process chamber in semiconductor equipment or other equipment.
Safety Instructions System Configuration/Role of Each Line and Component Series Variations Glossary Green Procurement (RoHS)
| Series | Operating environmental pressure (Pa)(abs) | Fluid | Opening window size (Height x Width) (mm) | Operating pressure (MPa)(G) |
|---|---|---|---|---|
| XGT | Atmospheric pressure to 10-6 | Inert gas type vacuum | 32 x 222 46 x 236 50 x 336 | 0.45 to 0.6 |
Rodless Cylinder for Vacuum CYV
High Vacuum Equipment ? Rodless Cylinders for Vacuum
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?Air cylinder for transfer in vacuum environments (1.3 x 10-4 Pa)
Safety Instructions System Configuration/Role of Each Line and Component Series Variations Glossary Green Procurement (RoHS)
| Series | Operating environment pressure [Pa (ABS)] | Bore size (mm) |
|---|---|---|
| CYV | Atmosphere to 1.3 x 10-4 | 15, 32 |
